DOI: https://doi.org/10.15587/1729-4061.2014.33550

Study of porous silicon surface by mass spectroscopy methods

Микола Миколайович Берченко, Валерій Юрійович Єрохов, Степан Ігорович Нічкало, Євген Іванович Бережанський

Abstract


Silicon surfaces of multicrystalline substrates before and after the formation of porous silicon on them, used in the production of photovoltaic cells were studied by mass spectrometry methods. An analysis of the elemental surface composition by mass spectroscopy of secondary ions at various manufacturing stages, including before and after electrochemical etching to create a porous silicon layer was conducted in the research. Clean surfaces before etching in an electrolyte based on hydrofluoric acid (HF: C2H5OH=10:1) were compared with surfaces after the etching process, both at secondary ion spectra, and in 2D-ion images of the multicrystalline substrate surface that have been obtained on the mass-spectrometer TOF5 SIMS using a current of secondary ions CH3+. In particular,  the presence of ion CH3+, which can saturate the dangling bonds of the porous silicon surface, obtained due to the electrochemical technology using etchant solutions based on hydrofluoric acid with the addition of ((CH3)2NCOH) was checked. As can be seen from the above mass spectroscopy spectra, both oxygen complexes and hydrogen bonds are present on a clean silicon surface before etching. As shown in the 2D-ion image of the sample surface, the surface of the etched silicon contains a large number of secondary ions CH3+. This is also evident from the spectra of secondary ion emission of the silicon surface before and after etching.


Keywords


porous silicon; electrochemical hydrogenation; multicrystalline substrate; mass spectrometry; photovoltaic cell

References


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GOST Style Citations


1. Bilyalov, R. R. Multicrystalline silicon solar cells with porous silicon emitter [Text] / R. R. Bilyalov, R. Lüdemann, W. Wettling, L. Stalmans, J. Poortmans, J. Nijs et. al. // Solar Energy Materials and Solar Cells. – 2000. – Vol. 60, Issue 4. – Р. 391–420. doi: 10.1016/s0927-0248(99)00102-6 

2. Huang, Y. M. Porous silicon based solar cells [Text] / Y. M. Huang, Q.-L. Ma, M. Meng // Materials Science Forum. – 2011. – Vol. 663-665. – P. 836–839. doi: 10.4028/www.scientific.net/msf.663-665.836 

3. Jinsu, Y. Black surface structures for crystalline silicon solar cells [Text] / Y. Jinsu, Y. Gwonjong, Y. Junsin // Materials Science and Engineering, B. – 2009. – Vol. 159–160. – P. 333–337. doi: 10.1016/j.mseb.2008.10.019 

4. Fang, W. Analysis of sunlight loss for femtosecond laser microstructed silicon and its solar cell efficiency [Text] / W. Fang, C. Changshui, H. Huili // Applied Physics A. – 2011. – Vol. 103, Issue 4. – P. 977–982. doi: 10.1007/s00339-010-6095-0 

5. Foil, Н., Formation and application of porous silicon [Text] / Н. Foil, М. Christophersen, J. Carstensen, G. Hasse // Materials Science and Engineering R. – 2002. – Vol. 39. – P. 93–141.

6. Yerokhov, V. Yu. Porous silicon hydrogenizing for solar cells [Text] : In Proc. of First World Conference / V. Yu. Yerokhov, I. I. Melnyk, L. Z. Gasko, O. I. Iznin // Porous Semiconductors: Science and Technology. – Mallorca, Spain, 1998 – P. 169.

7. Yerokhov, V. Yu. Hydrogenated porous silicon in solar cells structure [Text] : In Proc. of 2nd World Conference / V. Yu. Yerokhov, I. I. Melnyk, N. Bogdanovsky, O. I. Iznin // Photovoltaic Solar Energy Conversion. – Vienna, Austria, 1998 – P. 1256–1259.

8. Bertoni, M. I. Impact of defect type on hydrogen passivation effectiveness in multicrystalline silicon solar cells [Text] : In Proc. of the 35th IEEE / M. I. Bertoni, S. Udelson, B. K. Newman, S. Bernardis et. al. // Photovoltaic Specialists Conference, 2010 – P. 345. doi: 10.1109/pvsc.2010.5616904 

9. Дружинін, А. О. Дослідження поверхонь мультикристалічних підкладок кремнію насичених воднем методами мас-спектроскопії [Текст] / А. О. Дружинін, В. Ю. Єрохов, Н. Н. Берченко // Східно–Європейський Журнал передових технологій. – 2014. – Т. 1, № 5(67). – C. 34–37. – Режим доступа: http://journals.uran.ua/eejet/article/view/21053/18887

10. Salman, K. A. The effect of etching time of porous silicon on solar cell performance [Text] / K. A. Salman, K. Omar, Z. Hassan // Superlattices and Microstructures. – 2011 – Vol. 50, Issue 6. – P. 647–658. doi: 10.1016/j.spmi.2011.09.006 

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Copyright (c) 2014 Валерій Юрійович Єрохов, Микола Миколайович Берченко, Степан Ігорович Нічкало, Євген Іванович Бережанський

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ISSN (print) 1729-3774, ISSN (on-line) 1729-4061