X-­ray diagnostics of the structure of near­surface layers of ion­implanted monocrystalline materials

Authors

DOI:

https://doi.org/10.15587/1729-4061.2018.151806

Keywords:

strain profile, X-ray diffraction, ion implantation, defects of structure, statistical dynamic theory of X-ray scattering

Abstract

A method for obtaining information on the distribution of the parameters of a crystalline structure in the thickness of a near-surface ion-implanted layer, types and characteristics of radiation defects (size, concentration, etc.) has been developed. The influence of the main diffraction parameters on the rocking curve was established, which made it possible to develop an algorithm for the approximation of the theoretically calculated rocking curves to the experimental ones. It is shown that at small doses of implantation, the value of the extinction coefficient μds influences most significantly on the intensity of the rocking curves outside the additional oscillatory structure, and the value of the static Debye-Waller factor E influences most significantly on the intensity of the last oscillations of the additional oscillatory structure that correspond to the maximum deformation. To characterize a defective system, it is necessary to analyze the diffuse component using a part of the rocking curve, which is located behind an additional oscillatory structure and in which the contribution of the coherent component is minimal. The method is tested in the analysis of boron-implanted iron-yttrium garnet films. The presented approach provides an opportunity to obtain much of information about the structure of the ion-implanted layer, since it uses the statistical dynamic theory of X-ray scattering, which takes into account the defects of the crystalline structure of any type and size. Also, this approach makes it possible to use all the information contained in the rocking curves and to assess the degree of uniqueness of the specified parameters

Author Biographies

Ivan Yaremiy, Vasyl Stefanyk Precarpathian National University Shevchenka str., 57, Ivano-Frankivsk, Ukraine, 76018

Doctor of Physical and Mathematical Sciences, Professor

Department of Materials Science and New Technologies

Sofiya Yaremiy, Ivano-Frankivsk National Medical University Halytska str., 2, Ivano-Frankivsk, Ukraine, 76018

PhD, Assistant

Department of Medical Informatics, Medical and Biological Physics

Mariia Povkh, Vasyl Stefanyk Precarpathian National University Shevchenka str., 57, Ivano-Frankivsk, Ukraine, 76018

Postgraduate student

Department of Materials Science and New Technologies

Olesia Vlasii, Vasyl Stefanyk Precarpathian National University Shevchenka str., 57, Ivano-Frankivsk, Ukraine, 76018

PhD, Associate Professor

Department of Informatics

Vasyl Fedoriv, Joint Research Laboratory of Magnetic Films No. 23 of G. V. Kurdyumov Institute for Metal Physics and Vasyl Stefanyk Precarpathian National University Akademika Vernadskoho blvd., 36, Kyiv, Ukraine, 03142

PhD, Researcher

Anna Luсas, Vasyl Stefanyk Precarpathian National University Shevchenka str., 57, Ivano-Frankivsk, Ukraine, 76018

PhD, Associate Professor

Department of Chemistry of the Environment and Chemical Education

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Published

2018-12-19

How to Cite

Yaremiy, I., Yaremiy, S., Povkh, M., Vlasii, O., Fedoriv, V., & Luсas A. (2018). X-­ray diagnostics of the structure of near­surface layers of ion­implanted monocrystalline materials. Eastern-European Journal of Enterprise Technologies, 6(12 (96), 50–57. https://doi.org/10.15587/1729-4061.2018.151806

Issue

Vol. 6 No. 12 (96) (2018): Materials Science

Section

Materials Science

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Copyright (c) 2018 Ivan Yaremiy, Sofiya Yaremiy, Mariia Povkh, Olesia Vlasii, Vasyl Fedoriv, Anna Luсas

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