ПЕТРОВ, С. В. Monosilane plasma pyrolysis reactor. Eastern-European Journal of Enterprise Technologies, [S. l.], v. 2, n. 5(68), p. 31–38, 2014. DOI: 10.15587/1729-4061.2014.23395. Disponível em: https://journals.uran.ua/eejet/article/view/23395. Acesso em: 22 dec. 2024.