Novosiadlyi S, Kotyk M, Dzundza B, Gryga V, Novosiadlyi S, Mandzyuk V. Formation of carbon films as the subgate dielectric of GaAs microcircuits on Si-substrates. EEJET [Internet]. 2017Oct.30 [cited 2024Nov.22];5(5 (89):26-34. Available from: https://journals.uran.ua/eejet/article/view/112289