Miasoiedova A, Minska N, Shevchenko R, Azarenkо O, Lukashenko V, Kyrychenko O, Zemlianskyi O, Trefilova L, Kamyshentsev G, Melezhyk R. Improving the manufacturing technology of sensing gas sensors based on zinc oxide by using the method of magnetron sputtering on direct current. EEJET [Internet]. 2023Apr.29 [cited 2024Nov.24];2(5 (122):31-7. Available from: https://journals.uran.ua/eejet/article/view/277428