Новосядлий СП, Терлецький АІ, Фрик ОБ. LASER TREATMENT PRECISE TECHNOLOGIES OF INTEGRATED CIRCUIT THIN FILM COMPONENTS. EEJET [Internet]. 2012Oct.9 [cited 2025Apr.14];5(5(59):35-4. Available from: https://journals.uran.ua/eejet/article/view/4573