THE STUDY OF MICROELECTROMECHANICAL PIEZOELECTRIC STRUCTURES BY THE METHOD OF ATOMIC FORCE MICROSCOPY
DOI:
https://doi.org/10.24025/2306-4412.3.2018.162704Keywords:
microelectromechanical structures, atomic force microscopy, surface microroughness, microdefects.Abstract
Currently leading manufacturers of electronic components serially produce a rather extensive list of elements, in which various microelectromechanical structures are included, such as various accelerometers, which are produced by millions of copies, resonators and electrical signals filters implemented on their basis, transformers and other microminiature electromechanical systems. The main advantage of using of elements, made of piezoceramic materials, in measuring devices is determined by their special structure, which allows to implement in one such element fundamentally different schemes, for example, for simultaneous measurement of temperature, pressure and humidity. The purpose of the work is to investigate hidden microdefects and microroughnesses of the surfaces of piezoelectric transducers using atomic force microscopy.Downloads
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Базіло, К. В., Білокінь, С. О., Бондаренко, М. О., & Медяник, В. В. (2018). THE STUDY OF MICROELECTROMECHANICAL PIEZOELECTRIC STRUCTURES BY THE METHOD OF ATOMIC FORCE MICROSCOPY. Bulletin of Cherkasy State Technological University, 1(3), 21–26. https://doi.org/10.24025/2306-4412.3.2018.162704
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Copyright (c) 2020 К. В. Базіло, С. О. Білокінь, М. О. Бондаренко, В. В. Медяник The authors who publish in this journal agree to the following terms:The authors reserve the right to authorship of their work and give the journal the right to first publish this work under the terms of the Creative Commons Attribution License CC BY-NC, which allows other persons to freely distribute published work with a mandatory reference to authors of the original work and the first publication of the work in this journal.
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