ANALYSIS АND CLASSIFICATION OF METROLOGICAL SUPPORT OF MEASUREMENTS OF NANOOBJECTS RELIEF

Методы исследования наноструктур

Authors

  • V.P. Kvasnikov National Aviation University, Ukraine
  • M.O. Kataieva National Aviation University, Ukraine

DOI:

https://doi.org/10.24025/2306-4412.1.2021.228157

Keywords:

nanotechnology, nanomeasurement, metrological support, methods and means of measurement, nanomaterials

Abstract

The article analyzes the existing methods and means of measuring objects in the nanometer range and develops their classification based on the main principles of use. The main parameters on which each described method is based are considered and the conditions for their most effective application
are determined. It is proved that chemical and electrical sets of properties of the nanomaterial can change when the particle size decreases to the nanometer size, which requires the inclusion of additional chemical and electrical tests in existing methods. Based on the analysis, it has been
determined that the method of scanning probe microscopy is the most functional and universal in solving a wide range of problems. The classification of existing methods of scanning probe microscopy
based on the nature of their applications is developed. The main directions of creation and use of methods of measurement of micro- and nanosystems are determined, namely: creation of model representations of connections of topological characteristics and reaction of object to external influences, establishment of communications between properties of an element or system, research of structure, charges and fields, establishing links between technological factors, the kinetics of formation and the properties of nanostructures, creation of models that link functional parameters of devices with the properties of structures. It is proved that in order to obtain more reliable results, the method of nanomeasurements should take into account the effects of external destabilizing factors on the nanoobject and ensure the possibility of correcting the deviations caused by them. To simplify the process of choosing nanomeasurement methods, a method for detecting deviations due to the influence of external destabilizing factors has been developed. Universal expressions for the description of a stream of the revealed deviations of nanoobjects of various configuration are received. It is recommended to use techniques based on the principle of integration of information provided by different methods to increase the accuracy of nano-measurements. It is proved that increasing the number of measurement methods used in the metrological analysis of nanoobjects will increase the reliability and accuracy of measurement results and each method will provide additional information.

Author Biographies

V.P. Kvasnikov, National Aviation University

Kvasnikov Volodymyr, Doctor of Technical Sciences, Professor, Head of the Department of Computerized Electrical Systems and Technologies of the National Aviation University, Honored Metrologist of Ukraine

M.O. Kataieva, National Aviation University

Kataieva Mariia, Ph.D., Associate Professor of the Department of Computerized Electrical Systems and Technologies of the National Aviation University

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Published

2021-04-15

How to Cite

Kvasnikov, V., & Kataieva, M. (2021). ANALYSIS АND CLASSIFICATION OF METROLOGICAL SUPPORT OF MEASUREMENTS OF NANOOBJECTS RELIEF: Методы исследования наноструктур. Bulletin of Cherkasy State Technological University, (1), 50–58. https://doi.org/10.24025/2306-4412.1.2021.228157

Issue

No. 1 (2021)

Section

Automation and Instrumentation

URN

http://vtn.chdtu.edu.uaurn:2306:44551.2021.228157

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