INVESTIGATION OF FUNCTIONAL SURFACES OF MECHATRONIC DEVICES BY MULTIPROBE ATOMIC FORCE MICROSCOPY
DOI:
https://doi.org/10.24025/2306-4412.3.2021.246972Keywords:
multiprobe atomic-force microscopy, mechatronic device, functional surface, surface topology, thin coatingAbstract
The results of solving the problem of accelerating the study of the characteristics of functional surfaces of mechatronic devices by atomic force microscopy through the use of multiprobe tools, which provides the necessary levels of accuracy and reliability of the results, are shown. To do this, the surfaces of mechatronic elements have been studied to determine geometric (state, topology and morphology) and mechanical (microhardness, wear resistance and adhesive strength) characteristics of functional surfaces of mechatronic devices as a result of their experimental study by multiprobe atomic force microscopy. For the first time it is shown that the main advantage of the method of multiprobe atomic force microscopy in comparison with other methods of atomic force microscopy is the ability to study nanorelief and mechanical characteristics of functional surfaces of mechatronics products in one pass of the study area. At the same time, after removing the load from the action of the probe on the site, there is an elastic recovery of the surface, which minimizes its residual deformation. In general, the complete sequence of measurement studies by this method is given in the form of a block diagram. To confirm the adequacy of the results of experimental studies obtained by multiprobe atomic force microscopy, comparisons have been made with the results obtained by the basic method of atomic force microscopy, as well as with verification data obtained by alternative methods (interference microscopy, scanning electron microscopy, scanning electron microscopy, scanning Vickers microhardness). Based on the research, it has been first established that the use of the developed method of multiprobe atomic force microscopy allows: to increase 2.9 times the resolution of artifacts on the surface of the elements of mechatronic devices, to reduce the time of the study by 1.6… 1.9 times; to obtain surface morphology at the level of quality corresponding to the method of scanning electron microscopy; to determine the microhardness of materials in the range of 140 MPa… 44 GPa, wear resistance and change in the value of the adhesive strength of the functional coating on the surfaces of mechatronic devices (measurement error of these characteristics did not exceed 8 %). In future it is planned to investigate the influence of operating parameters and surface condition of the probes of the multiprobe instrument on the accuracy, quality and efficiency of the study by multi-probe atomic force microscopy.
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Copyright (c) 2021 Ігор Сергійович Кобиць, Олександр Олександрович Бруньов, Ольга Іванівна Андрієнко, Світлана Олександрівна Білокінь, Максим Олексійович Бондаренко
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