NEVLIUDOV, I.; DEMSKA, N.; PALAGIN, V.; BOTSMAN, I. MATRIX-STRUCTURAL ANALYSIS OF THE STRESS-DEFORMED STATUS OF THE FLEXIBLE INTERFACES AND MEMS COMPONENTS. INNOVATIVE TECHNOLOGIES AND SCIENTIFIC SOLUTIONS FOR INDUSTRIES, [S. l.], n. 1 (11), p. 122–133, 2020. DOI: 10.30837/2522-9818.2020.11.122. Disponível em: https://journals.uran.ua/itssi/article/view/2522-9818.2020.11.122. Acesso em: 12 jul. 2026.