Nevliudov I, Demska N, Palagin V, Botsman I. MATRIX-STRUCTURAL ANALYSIS OF THE STRESS-DEFORMED STATUS OF THE FLEXIBLE INTERFACES AND MEMS COMPONENTS. ITSSI [Internet]. 2020Mar.23 [cited 2024Jul.17];(1 (11):122-33. Available from: https://journals.uran.ua/itssi/article/view/2522-9818.2020.11.122