Spectro-ellipsometric investigations of thin films of tio<sub>2</sub>–zro<sub>2</sub>–hfo<sub>2</sub> systems
DOI:
https://doi.org/10.24144/2415-8038.2009.26.104-117Keywords:
Spectrometric and ellipsometric studies, Optical absorptionAbstract
Spectrometric and ellipsometric studies of TiO2–ZrO2–HfO2 thin films were performed. The dispersive dependences of the refractive indeces and extinction coefficients are calculated due to the optical-refractometric synthesis of the transmission spectra. The dispersion curves of the refractive indices are well described by the optical-refractometric relation. Compositional dependences of optical pseudogap and refractive indices of TiO2–ZrO2–HfO2thin films are investigated. Effect of compositional disordering on the optical absorption edge of the thin films under investigation is studied.
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