Влияние кислорода и углерода на образование окислительных дефектов упаковки в монокристаллическом кремнии
DOI :
https://doi.org/10.15587/2313-8416.2015.53451Mots-clés :
кремний, монокристалл, кислород, углерод, окислительный дефект упаковки, расплав, нагреватель, метод Чохральского, микродефектыRésumé
Экспериментально установлено, что плотность окислительных дефектов упаковки (ОДУ) в монокристаллических пластинах кремния, легированных бором, тем выше, чем больше отношение концентрации атомов кислорода к концентрации атомов углерода в них. По результатам исследования геометрии колец ОДУ в разных сечениях монокристалла реконструирована геометрия областей с разной их плотностью. При корректировке режимов выращивания монокристаллов кремния достигается повышение выхода годного продукта
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(c) Tous droits réservés Иван Федорович Червоный, Алексей Вадимович Бубинец 2015
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