The laws of structure formation in vacuum-arc deposition multilayer TiN-MoN nanostructured coatings
DOI:
https://doi.org/10.15587/1729-4061.2011.2270Keywords:
Vacuum arc, diffractometry, multilayer coatings, TiN-MoNAbstract
The laws of structure formation in multilayer TiN-MoN coatings depending on deposition conditions - bias potential, thickness of the layers, applying of high-voltage pulses, were studied by X-ray diffraction
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Copyright (c) 2014 Олег Валентинович Соболь, Анатолий Афанасьевич Андреев, Сергей Николаевич Григорьев, Виктор Федорович Горбань, Вячеслав Александрович Столбовой, Ирина Витальевна Сердюк, Владислав Евгеньевич Фильчиков
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