Thermodynamic analysis of hydrochlorination process of technical silicon
DOI:
https://doi.org/10.15587/1729-4061.2011.2300Keywords:
Рolycrystalline silicon, chlorination, trichlorosilaneAbstract
The thermodynamic analysis of the reactions proceeding in the course of a hydrochlorination of technical silicon is made. It is shown that the greatest interest represents use of catalytic reactions which are capable to raise considerably efficiency of process of a hydrochlorination of technical siliconReferences
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Copyright (c) 2014 Иван Федорович Червоный, Юрий Васильевич Реков, Сергей Геннадиевич Егоров, Роман Николаевич Воляр
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