The influence of an object surface on measuring geometric dimensions in digital optical microscopy
DOI:
https://doi.org/10.15587/1729-4061.2014.31948Keywords:
micrometer object, digital optical microscopy, geometric dimensionsAbstract
The paper presents experimental findings on measuring metrological parameters of LOMO projections obtained with an atomic force microscope. The research has proved that gauge-producing technologies that consist in mechanical mirror cutting result in flood coating. The floods obscure the position of the marker point in the program of the coordinates that outline object dimensions. We have determined that, with equal deviations from the focus, the biggest measurement error is observed while using a LOMO gauge on the projection. The experiment has proved that, under the same conditions of the experiment, a gauge on LOMO transmission (photolithography technology) and a 2D Bruker projection gauge, which is produced by means of electronic lithography, cause much smaller measurement errors. This should be taken into account while choosing a microscope focus gauge.
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Copyright (c) 2014 Ольга Миколаївна Маркіна, Олена Ігорівна Сингаївська, Володимир Петрович Маслов, Наталія Володимирівна Качур
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