ZnO nanostructures as sensing element of acoustic wave sensor

Authors

  • Oleksandr Bogdan National Technical University of Ukraine “Kyiv Polytechnic Institute” 37 Prospect Peremogy, Kiev 03056, Ukraine, Ukraine
  • Anatolii Orlov National Technical University of Ukraine “Kyiv Polytechnic Institute” 37 Prospect Peremogy, Kiev 03056, Ukraine, Ukraine
  • Oleg Petrischev National Technical University of Ukraine “Kyiv Polytechnic Institute” 37 Prospect Peremogy, Kiev 03056, Ukraine, Ukraine
  • Veronika Ulianova National Technical University of Ukraine “Kyiv Polytechnic Institute” 37 Prospect Peremogy, Kiev 03056, Ukraine, Ukraine

DOI:

https://doi.org/10.15587/1729-4061.2012.6021

Keywords:

sensor, acoustic wave, ZnO nanorods, , hydrothermal method, elastic half-space

Abstract

In spite of the wide application of SAW devices the investigation of novel sensitive materials, their synthesis methods is continuously carried out. For further quality and accuracy enhancement, simplification of manufacturing and improvement of applying the simulation of novel acoustic wave sensors operation should be performed. In ZnO nanorods-based sensors propagating surface wave imparts following motion to the ends of hydrothermally grown between two interdigitated transducers rod nanostructures: vertical displacement, horizontal displacement and rotations in plane. Thus, response of nanostructured elements to that displacements and kinematic characteristics of Relay waves are evaluated. During the simulation the frequency equation from which we can determine the velocity of propagation of a surface wave for a given geometrical parameters of the rod nanostructures, the values of the density of their distribution on the surface of the half-space and added masses is obtained. This model simplifies the development and analysis of the results from ZnO nanorods-based SAW sensors for biological and chemical agents, including molecules, cells and tissues. Performed simulation extends the range of tools for further development of nanorods-based SAW sensors due to comprehensive math-based explanation of their operating principles

Author Biographies

Oleksandr Bogdan, National Technical University of Ukraine “Kyiv Polytechnic Institute” 37 Prospect Peremogy, Kiev 03056, Ukraine

Deputy director of Scientific and Research Institute of Applied Electronics

Anatolii Orlov, National Technical University of Ukraine “Kyiv Polytechnic Institute” 37 Prospect Peremogy, Kiev 03056, Ukraine

PhD, Associate Professor

Department of Microelectronics

Oleg Petrischev, National Technical University of Ukraine “Kyiv Polytechnic Institute” 37 Prospect Peremogy, Kiev 03056, Ukraine

DPhil, Associate Professor

Department of Acoustics and Acoustoelectronics

Veronika Ulianova, National Technical University of Ukraine “Kyiv Polytechnic Institute” 37 Prospect Peremogy, Kiev 03056, Ukraine

Postgraduate student

Department of Microelectronics

References

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Published

2012-12-26

How to Cite

Bogdan, O., Orlov, A., Petrischev, O., & Ulianova, V. (2012). ZnO nanostructures as sensing element of acoustic wave sensor. Eastern-European Journal of Enterprise Technologies, 6(12(60), 16–22. https://doi.org/10.15587/1729-4061.2012.6021

Issue

Vol. 6 No. 12(60) (2012): Sensory semiconductor devices

Section

Sensory semiconductor devices

License

Copyright (c) 2014 Oleksandr Bogdan, Anatolii Orlov, Oleg Petrischev, Veronika Ulianova

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