Study of surface multicrystalline substrates silicon saturated aqueous by mass spectroscopy

Authors

DOI:

https://doi.org/10.15587/1729-4061.2014.21053

Keywords:

photoelectric converter, porous silicon, electrochemical hydrogenation, multicrystalline substrate, mass spectrometry

Abstract

Hydrogen-saturated surfaces of multicrystalline silicon substrates Baysix with porous silicon, used in the photoelectric converters production were studied using mass-spectrometry methods. Hydrogen saturation was carried out by electrochemical hydrogenation of porous silicon on p-type multicrystalline silicon substrates Baysix with resistivity 1...10 ohm・sm. Comparison of multicrystalline silicon samples surfaces was carried out before and after hydrogenation in the electrolyte, based on hydrofluoric acid, both in the secondary ions spectra and in the image of elements distribution on the surface (mode of ion microprobe and mass-spectral ion microscope). 2D-ion images of the multicrystalline substrate surface were obtained on the mass-spectrometer TOF5 SIMS using the current of hydrogen secondary ions H+ and molecular SiH2+. A number of samples were measured, depending on the electrochemical treatment time in the electrolyte. Analysis of hydrogenation modes, studied by the relative current intensity of the hydrogen secondary ions H+ of the surface of multicrystalline silicon sample Baysix shows that hydrogenation turns into saturation after two hours of treatment. Dynamic etching mode on the mass-spectrometer TOF5 SIMS with determining the hydrogen amount from the surface deep into the studied sample shows that hydrogen concentration, determined by the intensity of secondary ions H+ is higher on the surface and monotonously reduces deep into the sample.

Author Biographies

Анатолій Олександрович Дружинін, Lviv Polytechnic National University Bandera Str., 12, Lviv, Ukraine, 79013

Professor, D.Sc.

Department of Semiconductor Electronics

Валерій Юрійович Єрохов, Lviv Polytechnic National University Bandera Str., 12, Lviv, Ukraine, 79013

As. Professor, D.Sc.

Department of Semiconductor Electronics

Микола Миколайович Берченко, Centre of Microelectronics and Nanotechnology of Rzeszów University ul. Pigonia 1, 35-959 Rzeszów, Poland

Professor

References

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Published

2014-02-07

How to Cite

Дружинін, А. О., Єрохов, В. Ю., & Берченко, М. М. (2014). Study of surface multicrystalline substrates silicon saturated aqueous by mass spectroscopy. Eastern-European Journal of Enterprise Technologies, 1(5(67), 34–37. https://doi.org/10.15587/1729-4061.2014.21053

Issue

Vol. 1 No. 5(67) (2014): Applied physics

Section

Applied physics

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Copyright (c) 2014 Анатолій Олександрович Дружинін, Валерій Юрійович Єрохов, Микола Миколайович Берченко

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