Information technology quality management process of growing semiconductor single crystals

Authors

  • Игорь Васильевич Шевченко Kremenchug National University named after Mikhail Ostrogradskii Pershotravneva 20, Kremenchuk, Ukraine, 39600, Ukraine

DOI:

https://doi.org/10.15587/1729-4061.2014.25193

Keywords:

information technology, growing single crystals, monitoring, decision support, optimization

Abstract

A complex of information technologies for quality management of growing semiconductor single crystals is developed. The complex includes information technology for temperature field monitoring, information technology for operational decision support on the growing mode correction and information technology for optimizing geometrical parameters of the heat shield of growth setup. Growing semiconductor single crystals in most cases is carried out by the Czochralski method. Growing process is a complex combination of thermal and mechanical phenomena and is characterized by nonstationarity. Therefore, using stabilization and program management systems does not guarantee the process stability. Control over axial and radial temperature gradients in the ingot and the crystallization front zone is necessary. However, existing growing control methods and systems do not allow to realize these functions. The proposed information technologies implement indirect measurement of parameters of temperature fields in the melt and the ingot. This allows timely identify adverse situations and give recommendations for their elimination. In addition, it became possible to optimize the heat shield size and position in the ingot cooling zone. Implementing information technologies has allowed to reduce losses from the growing process failure and the cost of experimental works on selecting the geometric parameters of heat shields.

Author Biography

Игорь Васильевич Шевченко, Kremenchug National University named after Mikhail Ostrogradskii Pershotravneva 20, Kremenchuk, Ukraine, 39600

Ph.D., Associate Professor

Department of Information and Control Systems

References

  1. Crowley, А. А. Modelling of the growth of GaAs by LEC Technique [Text] / А. А. Crowley, E. I. Stern, D. I. Hurle // Thermal distribution in the crystal. J. Cryst. Growth. – 1991. – № 108 (2). – P. 627–636.
  2. Nalbandyan, H. G. Possibility of programming and optimal control of growth in the Czochralski technique [Text] / H. G. Nalbandyan // J. Crystal Growth. – 1984. – № 67 (1). – P. 115–118.
  3. Satunkin, G. A. Mathematical modeling and control system design of Czochralski and liquid encapsulated Czochralski process: the basic low order mathematical model [Text] / G. A. Satunkin // J. of Crystal Growth. – 1995. – Vol. 154, № 1-2. – P. 172–188.
  4. Riedling, K. Autonomous liquid encapsulated Czochralski (LEC) growth of single crystal GaAs by “intelligent’ digital control [Text] / K. Riedling // J. Crystal Growth. – 1988. – Vol. 89, Issue 4. – P. 435–446.
  5. Mikki, F. T. A Neural Network Approach in a Backward Heat Conduction Problem [Text] : proc. of the IV Brazilian conf. / F. T. Mikki, E. I. Issamoto, J. da Luz, P. P. B. de Oliveira, H. F. Campos-Velho, J. D. S. da Silva // Neural Networks, 1999. – P. 19–24.
  6. Левыкин, В. М. Информационная технология мониторинга температурных полей в процессе выращивания монокристаллов [Текст] / В. М. Левыкин, И. В. Шевченко // Вимірювальна та обчислювальна техніка в технологічних процесах. – 2014. – № 1 (46). – С. 133–138.
  7. Zadeh, L. A. From Сomputing with Numbers to Computing with Words – From Manipulation of Measurements to Manipulation of Perceptions [Text] / L. A. Zadeh // IEEE Transactions on Circuits and Systems. – 1999. – Vol. 45. – P. 105–119.
  8. Тakagi, T. Fuzzy identifications of systems and its application to modeling and control [Text] / T. Тakagi, M. Cugeno // IEEE Trans. SMC-15. – 1985. – № 1. – P. 116–132.
  9. Шевченко, И. В. Диагностика неблагоприятных ситуаций в процессе выращивания монокристаллов полупроводников [Текст] / И. В. Шевченко, Н. Н. Дымченко, С. А. Грицаков // Вісник Кременчуцького національного університету ім. Михайла Остроградського. – 2014. – Вип. 1/2014 (84). – С. 34–43.
  10. Шевченко, И. В. Информационная технология оптимизации геометрических параметров тепловых узлов установок для выращивания монокристаллов [Текст] / И. В. Шевченко // Вісник Кременчуцького національного університету ім. Михайла Остроградського. – 2013. – Вип. 4 (81). – С. 114–120.
  11. Crowley, А. А., Stern, E. I., Hurle, D. I. (1991). Modelling of the growth of GaAs by LEC Technique. 1. Thermal distribution in the crystal. J. Cryst. Growth, 108 (2), 627–636.
  12. Nalbandyan, H. G. (1984). Possibility of programming and optimal control of growth in the Czochralski technique. J. Crystal Growth, 67 (1), 115–118.
  13. Satunkin, G. A. (1995). Mathematical modeling and control system design of Czochralski and liquid encapsulated Czochralski process: the basic low order mathematical model. J. of Crystal Growth, Vol. 154, 1-2, 172–188.
  14. Riedling, K. (1988). Autonomous liquid encapsulated Czochralski (LEC) growth of single crystal GaAs by “intelligent’ digital control. J. Crystal Growth, Vol. 89 Issue 4 July 1, 435–446.
  15. Mikki, F. T., Issamoto, E. I., J. da Luz, P. P. B. de Oliveira, Campos-Velho, H. F., J. D. S. da Silva (1999). A Neural Network Approach in a Backward Heat Conduction Problem. Proceedings of the IV Brazilian Conference on Neural Networks, 19–24.
  16. Zadeh, L. A. (1999). From Сomputing with Numbers to Computing with Words – From Manipulation of Measurements to Manipulation of Perceptions. IEEE Transactions on Circuits and Systems, 45, 105–119.
  17. Тakagi, T., Cugeno, M. (1985). Fuzzy identifications of systems and its application to modeling and control. IEEE Trans. SMC-15, 1, 116–132.
  18. Levykin, V. M., Shevchenko, I. V. (2014). Information technology for temperature fields monitoring during the single srystals growth. Vymiruvalna ta obchyslyuvalna tekhnika v tekhnologichnykh protsessakh, 1 (46), 133–138.
  19. Shevchenko, I. V., Dymchenko, N. N., Gritsakov, S. A. (2014). Diagnotics of adverse conditions during semiconductor single crystal growth, Transactions of Kremenchuk Mykhailo Ostrohradskyi National University, 84 (1), 34–43.
  20. Shevchenko, I. V. (2013). The information technology for optimization of the heating units geometry of single crystal growth systems. Transactions of Kremenchuk Mykhailo Ostrohradskyi National University, 81(4), 114–120.

Downloads

Published

2014-06-25

How to Cite

Шевченко, И. В. (2014). Information technology quality management process of growing semiconductor single crystals. Eastern-European Journal of Enterprise Technologies, 3(2(69), 52–56. https://doi.org/10.15587/1729-4061.2014.25193

Issue

Vol. 3 No. 2(69) (2014): Information technology. Industry control systems

Section

Industry control systems

License

Copyright (c) 2014 Игорь Васильевич Шевченко

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

The consolidation and conditions for the transfer of copyright (identification of authorship) is carried out in the License Agreement. In particular, the authors reserve the right to the authorship of their manuscript and transfer the first publication of this work to the journal under the terms of the Creative Commons CC BY license. At the same time, they have the right to conclude on their own additional agreements concerning the non-exclusive distribution of the work in the form in which it was published by this journal, but provided that the link to the first publication of the article in this journal is preserved.

A license agreement is a document in which the author warrants that he/she owns all copyright for the work (manuscript, article, etc.).
The authors, signing the License Agreement with TECHNOLOGY CENTER PC, have all rights to the further use of their work, provided that they link to our edition in which the work was published.
According to the terms of the License Agreement, the Publisher TECHNOLOGY CENTER PC does not take away your copyrights and receives permission from the authors to use and dissemination of the publication through the world's scientific resources (own electronic resources, scientometric databases, repositories, libraries, etc.).
In the absence of a signed License Agreement or in the absence of this agreement of identifiers allowing to identify the identity of the author, the editors have no right to work with the manuscript.
It is important to remember that there is another type of agreement between authors and publishers – when copyright is transferred from the authors to the publisher. In this case, the authors lose ownership of their work and may not use it in any way.