LASER TREATMENT PRECISE TECHNOLOGIES OF INTEGRATED CIRCUIT THIN FILM COMPONENTS

Authors

  • Степан Петрович Новосядлий Precarpathian National University V.Stefanyk Shevchenko str., 57, Ivano-Frankivsk, Ukraine, 76025, Ukraine
  • Андрій Іванович Терлецький Precarpathian National University V.Stefanyk Shevchenko str., 57, Ivano-Frankivsk, Ukraine, 76025, Ukraine
  • Оксана Богданівна Фрик Precarpathian National University V.Stefanyk Shevchenko str., 57, Ivano-Frankivsk, Ukraine, 76025, Ukraine

DOI:

https://doi.org/10.15587/1729-4061.2012.4573

Keywords:

thin film elements, laser adjustment, exactness and stability of parameters, integrated and hybrid circuits.

Abstract

In the present article the questions of the laser using for the image generation and film elements treatment of the integrated circuit structures are reflected, the thermalphysic analysis of stage of the film laser heating and mechanisms of the local removal of films under laser radiation action are realized. Among the methods of forming of optical image the contour-radial (focusing), projection, contour-projection, contact and holographic methods are considered in detail. Considerable attention is devoted to the analysis of precision and ground of laser treatment modes of film elements. The row of technological processes of film laser treatment is considered in the structures of the integrated circuits, such as the adjustment of electro-physical parameters of film elements, the alignment of film resistors and condensers, the tuning of parameters and the forming of microwave circuits structures, and also the alignment of discrete quartz elements. Considerable attention is devoted to the questions of laser lithography, namely to the forming of film elements topology and the making of photomasks by the image multiplication. The results of original researches are resulted, which were conducted with the purpose of choice of the rational modes of film elements treatment for creation of industrial prototypes of integral and hybrid microcircuits.

Author Biographies

Степан Петрович Новосядлий, Precarpathian National University V.Stefanyk Shevchenko str., 57, Ivano-Frankivsk, Ukraine, 76025

Doctor of Technical Sciences, Professor

Department of Radio Physics and Electronics

Андрій Іванович Терлецький, Precarpathian National University V.Stefanyk Shevchenko str., 57, Ivano-Frankivsk, Ukraine, 76025

Doctor of Physics and Mathematics, Associate Professor

Department of Radio Physics and Electronics

Оксана Богданівна Фрик, Precarpathian National University V.Stefanyk Shevchenko str., 57, Ivano-Frankivsk, Ukraine, 76025

Engineer

Department of Radio Physics and Electronics

References

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Published

2012-10-09

How to Cite

Новосядлий, С. П., Терлецький, А. І., & Фрик, О. Б. (2012). LASER TREATMENT PRECISE TECHNOLOGIES OF INTEGRATED CIRCUIT THIN FILM COMPONENTS. Eastern-European Journal of Enterprise Technologies, 5(5(59), 35–45. https://doi.org/10.15587/1729-4061.2012.4573

Issue

Vol. 5 No. 5(59) (2012): Applied physics

Section

Applied physics

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Copyright (c) 2014 Степан Петрович Новосядлий, Андрій Іванович Терлецький, Оксана Богданівна Фрик

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