The use of technologies for stabilizing the electrophysical characteristics of sensor structures used in the development and manufacture of measuring transducers

Authors

DOI:

https://doi.org/10.15587/1729-4061.2023.274686

Keywords:

physical model, stabilization method, thermal training, polyfilm compensation, shock cycles, temporary stability

Abstract

The object of the study is the design, manufacturing technology and methods of stabilizing the electrophysical characteristics of measuring transducers. The problem solved in the research is the creation of methods and design and technological solutions to ensure stability used in the development and manufacture of measuring transducers. As a result of the conducted research, designs and technologies for manufacturing and stabilizing the electrophysical characteristics of measuring transducers were developed. The features of the developed designs of measuring transducers are increased in comparison with the known time stability with a basic error of no more than 0.1 %/year. Technologies for stabilizing the parameters of measuring transducers, in contrast to the known ones, differ in their versatility, since most elastic elements that perceive mechanical magnitude are membranes and beams, on which thermocompensating films are easily applied. The stabilization of the parameters of the entire measuring transducer, unlike the known ones, is carried out after the removal of internal mechanical stresses of each element and part of the measuring transducer through the integrated use of current and vibration dynamic loads. Thus, the use of complex compensation due to the application of a new method of compensation of internal mechanical stresses in the structure, based on the use of multilayer film compositions formed on sensitive elements, followed by thermal and vibration stabilization of measuring transducers. In addition, reducing the measurement error and increasing the time and parametric stability of the measuring transducers is achieved through the use of specialized heat treatment modes, training resonant vibration and current loads. When developing structures and stabilization methods, previously developed engineering mathematical models were used, including constructive, informational, dimensional, technological and circuit engineering. At the same time, depending on the adopted design and the technology used, engineering models were modified by including known coefficients and dependencies. This method has significantly reduced the cost and complexity of development

Author Biographies

Assem Kabdoldina, Al-Farabi Kazakh National University

PhD, Senior Lecturer

Department of Chemical Physics and Material Science

Zhomart Ualiyev, Satbayev University

PhD, Head of Department

Department of Higher Mathematics and Modeling

Sayat Ibrayev, U.A. Joldasbekov Institute of Mechanics and Engineering

Doctor, Professor

Department of Robotics

Nutpulla Jamalov, Al-Farabi Kazakh National University

PhD, Professor

Department of Mechanics

Arman Ibrayeva, Al-Farabi Kazakh National University

Master

Department of Mechanics

Yerkebulan Tuleshov, Satbayev University

PhD, Associate Professor

Department of Robotics and Technical Means of Automation

Azhar Analiyeva, Kazakhstan University of Innovative and Telecommunication Systems

Senior Lecturer

Department of Technical Disciplines

Dinara Arinova, Auezov University

PhD, Senior Lecturer

Department of Mechanics and Engineering

Askar Khikmetov, International IT University

PhD, Rector

Bolat Uaissov, Academy of Logistics and Transport

PhD, Associate Professor

Department of General Engineering

References

  1. Samakalev, S. S. (2021). Elastic sensing elements with improved metrological characteristics. Innovations and investments, 10, 86–89. Available at: https://cyberleninka.ru/article/n/uprugie-chuvstvitelnye-elementy-s-uluchshennymi-metrologicheskimi-harakteristikami
  2. Kalinkina, M. E., Kozlov, A. S., Labkovskaya, R. Ya., Pirozhnikova, O. I., Tkalich, V. L. (2019). Calculation of angular rigidity of elastic element for micromechanical accelerometer. Izvestiâ Vysših Učebnyh Zavedenij. Priborostroenie, 62 (6), 534–541. doi: https://doi.org/10.17586/0021-3454-2019-62-6-534-541
  3. Mechanical Behavior of Materials (2009). Cambridge University Press. Available at: https://ceimusb.files.wordpress.com/2015/04/mechanicalbehaviormeyers.pdf
  4. Mishra, S. R., Hassani Fard, S., Sheikh, T., Behdinan, K. (2022). Electromechanical Performance of Biocompatible Piezoelectric Thin-Films. Actuators, 11 (6), 171. doi: https://doi.org/10.3390/act11060171
  5. Bezzubceva, M. M., Volkov, V. S. (2015). Analytical review of the package of application programs for modeling of energy processes of consumer energy systems agroindustrial complex. International Journal of Applied and Fundamental Research, 6-2, 191–195. Available at: https://s.applied-research.ru/pdf/2015/6-2/6869.pdf
  6. Tulaev, A. T., Styazhkina, A.V., Kozlov, A. S., Belyaev, Ya. V. (2021). Micromechanical sensors design method based on system-level modeling. JCSTCS, 14 (2), 79–92. Available at: https://infocom.spbstu.ru/userfiles/files/articles/2021/2/79-92.pdf
  7. Schulz, P., Khimchenko, I. (2018). Trends in modeling and simulation of sensors. International Research Conference. Dortmund. Available at: https://www.researchgate.net/publication/328175605_TRENDS_IN_MODELING_AND_SIMULATION_OF_SENSORS
  8. Mikhaylov, P. G., Kassimov, A. O. (2017). Microelectronic Sensors for the Aircraft and Space-Rated Equipment. International Journal of Advanced Biotechnology and Research (IJBR), 8 (4), 152–157.
  9. Abdali, L. M., Issa, H. A., Ali, Q. A., Kuvshinov, V. V., Bekirov, E. A. (2021). Analysis and simulation off-grid PV panels by using matlab / simulink environment. Construction and Industrial Safety, 21 (73), 97–105. doi: https://doi.org/10.37279/2413-1873-2021-21-97-105
  10. Mikhajlov, P. G., Slesarev, Yu. N., Chulkov, V. A. (2016). Mathematical Modeling of Combined Sensor Information - Measuring Systems. International Journal of Applied Engineering Research, 11 (20), 10332–10337.
  11. Mikhailov, P., Ualiyev, Z. (2020). Sensor stability assurance problems and their relationship with the overall problems of providing system performance quality. MATEC Web of Conferences, 329, 03032. doi: https://doi.org/10.1051/matecconf/202032903032
  12. Song, P., Ma, Z., Ma, J., Yang, L., Wei, J., Zhao, Y. et al. (2020). Recent Progress of Miniature MEMS Pressure Sensors. Micromachines, 11 (1), 56. doi: https://doi.org/10.3390/mi11010056
  13. Kalinkina, M. E., Korobeynikov, A. G. et al. (2019). Analysis of parameters of built-in pressure sensors with a thermostable sensing element. Scientific and Technical Bulletin of the Volga region, 1, 81–83.
  14. Meng, Q., Lu, Y., Wang, J., Chen, D., Chen, J. (2021). A Piezoresistive Pressure Sensor with Optimized Positions and Thickness of Piezoresistors. Micromachines, 12 (9), 1095. doi: https://doi.org/10.3390/mi12091095
  15. Parameswaran, C., Gupta, D. (2019). Large area flexible pressure/strain sensors and arrays using nanomaterials and printing techniques. Nano Convergence, 6 (1). doi: https://doi.org/10.1186/s40580-019-0198-x
  16. Mikhailov, P., Baktybayev, M., Bayasilova, Z. et al. (2018). Multi-functional sensors for control systems and monitoring. International Journal of Mechanical Engineering & Technology, 9 (13), 959–967. Available at: https://iaeme.com/MasterAdmin/Journal_uploads/IJMET/VOLUME_9_ISSUE_13/IJMET_09_13_101.pdf
  17. Zhukova, S. A., Novikov, E. A., Obizhaev, D. Yu. et al. (2021). Features of the technology of forming sensitive elements of inertial sensors based on structures "silicon above the cavity" sealed at the plate level. Nanoindustry, 14 (7s), 491–493.
  18. Plane section hypothesis (Bernoulli's hypothesis). Available at: https://sopromato.ru/rastyazhenie-i-szhatie/gipoteza-ploskih-secheniy
  19. Jackson, R. G. (2007). The latest sensors. Moscow: Technosphere, 380.
  20. Mikhailov, P. G., Ualiyev, Z., Kabdoldina, A., Sokolov, A. V. (2020). Control and optimization of technological processes for forming nanoscale films for sensitive sensor elements. IOP Conference Series: Materials Science and Engineering, 971 (4), 042086. doi: https://doi.org/10.1088/1757-899x/971/4/042086
  21. Mikhailov, P. G., Chuvykin, B. V., Mikhailov, A. P. (2019). Questions of Control of Electrophysical Properties of Materials and Structures of Microelectronic Sensors. 2019 International Multi-Conference on Industrial Engineering and Modern Technologies (FarEastCon). doi: https://doi.org/10.1109/fareastcon.2019.8934894
  22. Mikhailov, P., Ualiyev, Z., Kabdoldina, A., Smailov, N., Khikmetov, A., Malikova, F. (2021). Multifunctional fiber-optic sensors for space infrastructure. Eastern-European Journal of Enterprise Technologies, 5 (5 (113)), 80–89. doi: https://doi.org/10.15587/1729-4061.2021.242995
  23. Kabdoldina, A., Ualiyev, Z., Smailov, N., Malikova, F., Oralkanova, K., Baktybayev, M. et al. (2022). Development of the design and technology for manufacturing a combined fiber-optic sensor used for extreme operating conditions. Eastern-European Journal of Enterprise Technologies, 5 (5 (119)), 34–43. doi: https://doi.org/10.15587/1729-4061.2022.266359
  24. Mikhailov, P. G., Ualiyev, Z. (2020). Issues of Ensuring the Stability of Thin-Film Heterostructures of Multifunctional Sensors of Information-Measuring Systems. 2020 International Multi-Conference on Industrial Engineering and Modern Technologies (FarEastCon). doi: https://doi.org/10.1109/fareastcon50210.2020.9271540
  25. Mikhailov, P. G., Ualiyev, Zh., Kabdoldina, A. (2020). Issues of Development of Capacitive Pressure Sensors Operable under Extreme Operating Conditions. 2020 International Russian Automation Conference (RusAutoCon). doi: https://doi.org/10.1109/rusautocon49822.2020.9208125
The use of technologies for stabilizing the electrophysical characteristics of sensor structures used in the development and manufacture of measuring transducers

Downloads

Published

2023-02-28

How to Cite

Kabdoldina, A., Ualiyev, Z., Ibrayev, S., Jamalov, N., Ibrayeva, A., Tuleshov, Y., Analiyeva, A., Arinova, D., Khikmetov, A., & Uaissov, B. (2023). The use of technologies for stabilizing the electrophysical characteristics of sensor structures used in the development and manufacture of measuring transducers. Eastern-European Journal of Enterprise Technologies, 1(5 (121), 6–16. https://doi.org/10.15587/1729-4061.2023.274686

Issue

Vol. 1 No. 5 (121) (2023): Applied physics

Section

Applied physics

License

Copyright (c) 2023 Assem Kabdoldina, Zhomart Ualiyev, Sayat Ibrayev, Nutpulla Jamalov, Arman Ibrayeva, Yerkebulan Tuleshov, Azhar Analiyeva, Dinara Arinova, Askar Khikmetov, Bolat Uaissov

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.

The consolidation and conditions for the transfer of copyright (identification of authorship) is carried out in the License Agreement. In particular, the authors reserve the right to the authorship of their manuscript and transfer the first publication of this work to the journal under the terms of the Creative Commons CC BY license. At the same time, they have the right to conclude on their own additional agreements concerning the non-exclusive distribution of the work in the form in which it was published by this journal, but provided that the link to the first publication of the article in this journal is preserved.

A license agreement is a document in which the author warrants that he/she owns all copyright for the work (manuscript, article, etc.).
The authors, signing the License Agreement with TECHNOLOGY CENTER PC, have all rights to the further use of their work, provided that they link to our edition in which the work was published.
According to the terms of the License Agreement, the Publisher TECHNOLOGY CENTER PC does not take away your copyrights and receives permission from the authors to use and dissemination of the publication through the world's scientific resources (own electronic resources, scientometric databases, repositories, libraries, etc.).
In the absence of a signed License Agreement or in the absence of this agreement of identifiers allowing to identify the identity of the author, the editors have no right to work with the manuscript.
It is important to remember that there is another type of agreement between authors and publishers – when copyright is transferred from the authors to the publisher. In this case, the authors lose ownership of their work and may not use it in any way.