Creating a mixture of gases for ion-plasma technologies

Authors

  • Юрий Александрович Сысоев Zhukovskiy National Aerospase University «Kharkov Aviation Institute» Chkalov, 17, Kharkov, Ukraine, 61070, Ukraine https://orcid.org/0000-0001-5006-8546
  • Виталий Павлович Руденко National Science Center «Kharkov Institute of Physics and Technology» Str. Academic, 1, Kharkov, Ukraine, 61108, Ukraine https://orcid.org/0000-0002-8592-117X
  • Андрей Валентинович Доломанов National Science Center «Kharkov Institute of Physics and Technology» Str. Academic, 1, Kharkov, Ukraine, 61108, Ukraine https://orcid.org/0000-0002-5530-2853

DOI:

https://doi.org/10.15587/1729-4061.2014.21873

Keywords:

gas mixtures, ion-plasma technology, partial gas pressure, gas mixture generator.

Abstract

A method for creating gas mixtures, intended for producing complex composition coatings in ion-plasma installations is proposed. The method is based on creating in a mixing chamber predetermined values of partial pressures of gas components. A peculiar feature of the method is a cyclic purging of the mixing chamber to create therein an atmosphere, consisting of no less than 99.9 % of one mixture component. Hereafter, according to the given percentage of gases in the mixture gas components are consistently supplied to the respective partial pressures.

The method is characterized by simplicity of implementation. An industrially applicable gas mixture generator (for case of three gases) was designed on its basis. The hardware and software of generator management system are developed. The gas mixture generator is characterized by high productivity of creating gas mixtures and the exact ratio of component in a mixture (the error of each component does not exceed 0.1 %). The application of the designed gas mixture generator in the processes of ion-plasma processing will provide obtaining the coatings with optimal properties.

Author Biographies

Юрий Александрович Сысоев, Zhukovskiy National Aerospase University «Kharkov Aviation Institute» Chkalov, 17, Kharkov, Ukraine, 61070

Candidate of Technical Sciences, docent

Виталий Павлович Руденко, National Science Center «Kharkov Institute of Physics and Technology» Str. Academic, 1, Kharkov, Ukraine, 61108

Еngineer 

Андрей Валентинович Доломанов, National Science Center «Kharkov Institute of Physics and Technology» Str. Academic, 1, Kharkov, Ukraine, 61108

Candidate of Technical Sciences, researcher

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Published

2014-04-15

How to Cite

Сысоев, Ю. А., Руденко, В. П., & Доломанов, А. В. (2014). Creating a mixture of gases for ion-plasma technologies. Eastern-European Journal of Enterprise Technologies, 2(5(68), 15–19. https://doi.org/10.15587/1729-4061.2014.21873

Issue

Vol. 2 No. 5(68) (2014): Applied physics

Section

Applied physics

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Copyright (c) 2014 Юрий Александрович Сысоев, Виталий Павлович Руденко, Андрей Валентинович Доломанов

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